| 摘要 |
PROBLEM TO BE SOLVED: To reduce the frequency of apparatus maintenance by swiftly heating and cooling to a temperature required by a load. SOLUTION: A heating and cooling apparatus 2 uses a medium capable of heating to a heating limit temperature of 200°C or higher and cooling to 0°C or lower in a liquid phase state. A heating medium circulation circuit C3 includes a heater 24 for heating the medium to a temperature higher than a heating set temperature required by the load W, supplies a heated medium to the load W through a third supply flow path 26 and returns the medium supplied to the load W through a forth return flow path 37. A cooling medium circulation circuit C2 includes a cooler 14 for cooling the medium to a temperature lower than a cooling set temperature required by the load W, and returns the medium supplied to the load W through a fifth return flow path 38. In response to the requirement of the load W, the circulation circuits C2 and C3 are switched to heat and cool the load W. COPYRIGHT: (C)2005,JPO&NCIPI
|
