| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinder capable of easily corresponding to various items without damaging a template, etc. in changing the template at the time of changing the items by the flat board grinder, more uniformly grinding the whole surface and reducing dispersion of film thickness of a coloring picture element and dispersion of a color filter chromaticity. <P>SOLUTION: This grinder is furnished with a middle surface plate 30 having the template 7 to fix a glass substrate 6 at a specified position on the undersurface side and a backing plate 20 to lighten a biased load when an upper surface plate 3 oscillates, and the middle surface plate is fixed on the upper surface plate free to connect and disconnect to and from it through the backing plate with its upper surface side directed toward a undersurface side of the upper surface plate. A material of the backing plate is foaming polyurethane. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
