| 摘要 |
PROBLEM TO BE SOLVED: To provide a member for a vapor phase growth apparatus which is excellent in oxidation resistance, plasma resistance, corrosion resistance, etc., and is usable stably for a long period of time. SOLUTION: This member for the vapor phase growth apparatus consists of an Si-containing glassy carbon material having a tissue structure which is uniformly dispersed and combined with Si of an atom level at a weight ratio of 0.5 to 15 wt.% in a glassy carbon structure and is uniformly distributed with the content (y) wt.% of O atoms existing in the structure within a range of ±2 wt.% of the content (x) wt.% of the Si atoms. The tissue structure has the structural characteristic in which the crystal structure substantially exclusive of a graphite structure does not substantially exist, the diffraction lines belonging to the metal Si and Si compound by the pattern analysis using an X-ray diffraction method are not detected and the granular structure is not identifiable by the observation of a transmission type electronmicroscope(TEM). |
