| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser element to be operated by low-threshold current and in a single mode. SOLUTION: A surface emitting laser element 100 has a structure obtained by successively laminating the following layers on a substrate 101, i.e., a reflection layer 102, a resonator spacer layer 103, an active layer 104, a resonator spacer layer 105, a superlattice structure film 106, and a reflection layer 107. High resistance layers 108A, 108B are formed in the reflection layer 107. A p-side electrode 109 is formed in a part of the reflection layer 107 excluding an outgoing port 107A. An n-side electrode 110 is formed on the rear surface of the substrate 101. The superlattice structure film 106 is arranged in a region other than the active layer 104 and the reflection layers 102, 107; and includes regions 106A, 106B, 106C. The regions 106A, 106C are composed of the disordered superlattice structure film. The region 106B is composed of the ordered superlattice structure film. COPYRIGHT: (C)2007,JPO&INPIT
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