发明名称 METHOD OF MANUFACTURING GLASS CERAMIC SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method of obtaining a glass ceramic substrate of a high dimensional accuracy by surely restricting the sinter shrinkage in the lamination plane of glass ceramic green sheets. SOLUTION: The manufacturing method comprises (i) laminating glass ceramic green sheets each having a conductor pattern on the surface to form a laminate, (ii) laminating restricting green sheets containing a specified sinter- retardant inorganic material powder and glass on both sides of the laminate, (iii) removing organic components from the laminate and baking to make a glass ceramic substrate with the restricting sheets, and (iv) removing the restricting sheets from the substrate. (v) The glass content of the restricting green sheets is insufficient for bonding them to the glass ceramic green sheets during baking and substantially shrinking them in the lamination plane, and the mean grain sizes and the grain size distributions of the inorganic material powder and the glass powder in the restricting green sheets are 1-5 &mu;m and (D90-D10)/D50<=4.
申请公布号 JP2002016360(A) 申请公布日期 2002.01.18
申请号 JP20000194391 申请日期 2000.06.28
申请人 KYOCERA CORP 发明人 YUFU TAKEHISA
分类号 C04B35/622;H01L23/13;H05K3/46 主分类号 C04B35/622
代理机构 代理人
主权项
地址