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发明名称
PROCESS AND APPARATUS FOR CLEANING A SILICON SURFACE
摘要
申请公布号
KR100784575(B1)
申请公布日期
2007.12.10
申请号
KR20010003907
申请日期
2001.01.27
申请人
发明人
分类号
C23C16/02;H01L21/304;H01L21/205;H01L21/302;H01L21/306;H01L21/3065
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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