Contamination control apparatus, management system and related methods

摘要

A contamination control apparatus includes at least two pipes connected by a joint portion and configured to allow a processing fluid to flow therethrough, and a cover configured to enclose the joint portion and to provide an enclosed cavity between the cover and the joint portion. An inlet port is connected to the cover and configured to supply a gas to the cavity. An outlet port is connected to the cover and configured to exhaust the gas and a contaminant from the cavity.