| 摘要 |
PROBLEM TO BE SOLVED: To suppress the degradation of the sensitivity of a detection device after using an industrial X-ray CT apparatus for a long period of time. SOLUTION: This industrial X-ray CT apparatus comprises a means emitting X-ray to a test object and an X-ray detection device detecting the X-ray transmitting through the test object using a semiconductor crystal. The X-ray detection device includes a first electrode arranged on a plane parallel to the X-ray emitting direction in the semiconductor crystal and second and third electrodes arranged on a plane facing to the first electrode. The third electrode is arranged nearby the plane where the X-ray is injected into the semiconductor crystal. COPYRIGHT: (C)2008,JPO&INPIT
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