| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of grasping the position of an inspecting object where an X-ray fluoroscopic image is photographed, even if many members having the same shape such as many solder balls in a BGA package are lined up on the inspecting objects, with less labor and time required for making a master image or the like. SOLUTION: This X-ray inspection apparatus 1 comprises: a stage 14; an X-ray measuring optical system 13; a stage driving mechanism 16 moving the stage 14 based on a driving signal; a display device 23; a data storing part 25 where data relating to the inspecting object involving an arrangement relationship of a plurality of measuring positions of the inspecting object S are inputted and stored; and a scheme display part 33 displaying the image of a scheme 24b showing the measuring position of the inspection object S on the display part 23, based on the data relating to the inspecting object. COPYRIGHT: (C)2008,JPO&INPIT
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