| 发明名称 |
FABRICATING A SPATIAL LIGHT MODULATOR |
| 摘要 |
A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.
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| 申请公布号 |
US2008220552(A1) |
申请公布日期 |
2008.09.11 |
| 申请号 |
US20080126832 |
申请日期 |
2008.05.23 |
| 申请人 |
SPATIAL PHOTONICS, INC., A DELAWARE CORPORATION |
发明人 |
PAN SHAOHER X. |
| 分类号 |
H01L21/02;G02B;G02B26/00;G02B26/08 |
主分类号 |
H01L21/02 |
| 代理机构 |
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