| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor for which an attempt can be made to improve its capacitance density despite its compactness, to improve selectivity of electrode metal and dielectric material, and to simplify its manufacturing process, and a method for manufacturing the same. SOLUTION: A capacitor element 12 is configured by a pair of conductive layers 14, 16, a plurality of dielectric materials 18 substantially in the form of a tube, a first electrode 20 on the outside of the dielectric material 18 and a second electrode 24 inside the dielectric material 18, and an insulating cap 28 that insulates the first electrode 20 from the conductive layer 14. The dielectric material 18 is formed by, after filling a gap of a structure with electrode material, which structure being made of an oxide substrate obtained by anode oxidation of metal, removing the structure and filling the gap with high-k dielectric constant material. It is made possible to increase the capacitance of a capacitor 10 by using a high-k dielectric material as well as increasing the area that specifies its capacitance. In addition, it is made possible to simplify the manufacturing process while increasing the selectivity of the electrode material and the dielectric material. COPYRIGHT: (C)2009,JPO&INPIT
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