INSPECTION EQUIPMENT FOR DIFFERENT KINDS OF COK

摘要

The present invention relates to an apparatus for inspecting a component of a handler for testing a semiconductor device which supports a test of the semiconductor device. The inspection apparatus for different kinds of changes of kit (COK) comprises: a supporter which can support a test tray on which semiconductor devices can be loaded, and also a match plate arranged to push the semiconductor devices loaded on the test tray toward a tester; an exterior inspector which is arranged to perform an exterior inspection on the test tray and the match plate which are supported by the supporter; and a controller which controls the supporter and the exterior inspector and diagnoses an inspection result from the exterior inspector. According to the present invention, since the test tray and the match plate are inspected using automated equipment and a predefined algorithm, reliability on a test quality is improved. Also, since the test tray and the match plate are all inspected by using one piece of equipment, a cost and a space required for the inspection equipment can be minimized.