CRYOPUMP, CONTROLLING METHOD OF CRYOPUMP, AND REFRIGERATOR

摘要

The present invention is provided to shorten the cooling time of a cryopump. The cryopump (10) includes a cryopanel and a refrigerator (16) which cools down the cryopanel. The refrigerator (16) includes: a refrigerator motor (80) which drives the refrigerator (16); and a refrigerator inverter (82) which controls the operating frequency of the refrigerator motor (80). A control unit (100) of the cryopump (10) controls the refrigerator (16) in order to perform a cooling operation which lowers the temperature of the cryopanel to a reference operation temperature from a room temperature. The control unit (100) includes: an operating frequency determining unit (110) which determines the operating frequency of the refrigerator motor (80) within an operating frequency range having the upper limit of the operating frequency and outputs the operating frequency to the refrigerator inverter (82); and an upper limit adjusting unit (112) which lowers the upper limit of the operating frequency based on the temperature drop of the cryopanel during the cooling operation.