圧電素子、液体噴射ヘッド、液体噴射装置、超音波デバイス及びセンサー並びに圧電素子の製造方法

摘要

A liquid ejecting head is provided with a piezoelectric element having a piezoelectric layer and a first electrode and a second electrode provided on the piezoelectric layer, in which the piezoelectric layer contains a buffer layer provided on the first electrode and having a perovskite structure containing bismuth, iron, and at least one of zinc and nickel and a complex oxide layer provided on the buffer layer and having a perovskite structure containing bismuth, iron, barium, and titanium.