Verfahren und Vorrichtung zum Transport und zum Positionieren mikromechanischer Teilchen

摘要

Method of transporting small micro-mechanical parts, wherein a small micro-mechanical part (1) is placed on the surface (2) of a still liquid and held there on account of the surface tension, wherein a predetermined path (5) is formed and wherein the small micro-mechanical part (1) is subjected to external forces, by means of which forces the small micro-mechanical part is transported along the predetermined path (5) on the surface (2) of the liquid. Furthermore, a method of positioning a small micro-mechanical part (1), wherein a small micro-mechanical part is placed on a liquid surface and held there on account of the surface tension, wherein the geometry of the liquid surface is formed in such a manner that the small micro-mechanical part is definitively aligned in terms of its spacial orientation, and wherein means are provided by means of which the spacial position of the small micro-mechanical part can be definitively set. Apparatus for carrying out the methods of transporting and positioning and an apparatus wherein a platform is held on the surface of a liquid, is transported and positioned there, wherein within the platform a small micro-mechanical part is positioned on the surface of a liquid with respect to the platform.