| 摘要 |
PURPOSE:To efficiently make a capital investment by dividing the surface of a surface plate into multiple areas by a concentric groove to increase productivity and polishing accuracy, in a polishing device for polishing by a rotating disk surface plate. CONSTITUTION:In a polishing device for polishing a body to be polished 2 by a rotating disk surface plate 1, the surface of the surface plate 1 is divided into multiple areas 1A and 1B by a concentric groove 8. By this, when different abrasive is used for each of the areas 1A and 1B, multiple polishing conditions are available on one polishing device and, when the body to be polished 2 is moved from a polishing area to another polishing area in radial direction of the surface plate 1, polishing under multiple conditions is enabled by one polishing device only. Thus, it is not necessary to re-fix the body to be polished 2 to the device for each change in polishing conditions. For example, when the polishing conditions are changed from rough polishing to finish polishing, only the movement of the body to be polished 2 in radial direction is necessary, and any displacement of the polishing surface is not produced. |
