| 摘要 |
PURPOSE:To provide a surface polishing device with vibration prevention device which prevents vibration surely by simple construction. CONSTITUTION:An upper surface plate 1 of a surface polishing device is suspended through a vibration prevention device 9 comprising an upper mounting member 10 extending downward from a surface plate suspension member 4, a lower mounting member 11 extending upward from the upper surface plate 1, a connecting frame 12 for connecting the upper and lower mounting members each other, and vibration prevention members 13 and 14 which are installed under retraction between the upper and lower members and the connecting frame so that the load of the upper surface plate is applied on each of them. |
