发明名称 |
NOZZLE HAVING HIGH MANUFACTURING YIELD |
摘要 |
The nozzle capable of improving production yield during development includes a nozzle pipe for flowing out a developer, an injector having an injection supporter which attaches the body of the injector to the nozzle pipe, and an injection board having a container-shape connected to the injection supporter through connectors, to lower the pressure of the developer flowing out from the nozzle pipe, and injecting the developer, thereby improving the developing uniformity.
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申请公布号 |
KR940008770(B1) |
申请公布日期 |
1994.09.26 |
申请号 |
KR19920006816 |
申请日期 |
1992.04.22 |
申请人 |
HYUNDAI ELECTRONICS CO., LTD. |
发明人 |
KIM, HAK - RYOL;CHOE, YONG - KUN;IN, JAE - SHIK;HWANG, JUN |
分类号 |
H01L21/306;(IPC1-7):H01L21/306 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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