发明名称 NOZZLE HAVING HIGH MANUFACTURING YIELD
摘要 The nozzle capable of improving production yield during development includes a nozzle pipe for flowing out a developer, an injector having an injection supporter which attaches the body of the injector to the nozzle pipe, and an injection board having a container-shape connected to the injection supporter through connectors, to lower the pressure of the developer flowing out from the nozzle pipe, and injecting the developer, thereby improving the developing uniformity.
申请公布号 KR940008770(B1) 申请公布日期 1994.09.26
申请号 KR19920006816 申请日期 1992.04.22
申请人 HYUNDAI ELECTRONICS CO., LTD. 发明人 KIM, HAK - RYOL;CHOE, YONG - KUN;IN, JAE - SHIK;HWANG, JUN
分类号 H01L21/306;(IPC1-7):H01L21/306 主分类号 H01L21/306
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