| 摘要 |
PURPOSE:To easily perform the X-ray analysis of a microscopic region on a sample by giving a large position change to the sample. CONSTITUTION:An X-ray optical element which is provided with a condensing and image formation action and whose working distance is long is combined with an X-ray generating device 1'. The rotation center of a sample scanning stage 10 to which a goniostage 15, a rotary stage 12 and rectlinearly advancing stages 17, 18, 19 capable of being moved precisely in three axes have been mounted and attached is arranged on the focal plane of the X-ray optical element. In addition, an X-ray position detector or an X-ray energy detector which can be turned by using the sample scanning stage 10 as the center are arranged. |
