| 摘要 |
PURPOSE:To detect simutaneously the absorbance of plural particle beams and to control it by irradiating light of plural hollow cathode lamps to the particle beams through a specified optical fiber flux and measuring it. CONSTITUTION:Light of plural hollow cathode lamps 56A-56C and a light source 58 (e.g. a D2 lamp) for a monitor is received in each branched part of an optical fiber flux 60 wherein one end is separated into plural parts and the other end is made into a bundle and irradiated to the particle beams 30 through the other end thereof, and the absorption of light proportional to the intensity of the particle beams is caused in the wavelengths intrinsic to the elements to each particle beam 30. The absorbed light is separated into its spectral components with a spectroscope 66 and light of each hollow cathode lamps 56A-56C is detected with the detectors 70A-70C and the indication signals 76A-76C are output from the intensity meters 74A-74C. These indication signals 76A-76C are inputted as the preset temp. values of the temp. regulators of every particle beam source, and the intensities of the particle beams of each particle beam source are controlled.
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