PHTOTHERMIC DISPLACEMENT SIGNAL DETECTION METHOD AND DEVICE

摘要

PURPOSE:To detect information regarding the surface and inside of a sample speedily and stably while space resolution is improved. CONSTITUTION:A sheet beam is used for excitation light 46 and probe light 145 to detect a photothermic displacement image speedily and a one-dimensional sensor 82 is used to detect interference light. Also, by performing image processing to the photothermic displacement image obtained from the one- dimensional sensor 82, resolution deterioration in the longitudinal direction of the one-directional sensor 82 can be recovered.