SPUTTERLING TARGET AND PRODUCTION OF SUPERCONDUCTING THIN FILM THEREFROM

摘要

PURPOSE:To provide the title target consisting of Bi, Cu, Ca and oxide(s) containing alkaline earth element(s) [group IIa element(s)] incorporated with each excess of Bi and Ca compared to the composition of the aimed thin film to readily obtain favorable superconducting characteristics. CONSTITUTION:The objective sputterling target consisting at least of Bi, Cu, Ca and oxide(s) of alkaline earth element(s) [group IIa element(s)] incorporated with each excess of Bi and Ca compared to the composition of the aimed thin film. Said target may be used in the form of the powder or granules of a sintered form besides a sintered form itself.