| 摘要 |
PURPOSE: To provide a stator to prevent or minimize the gas counterflow from the exhaust side to suction side of a turbomolecular pump using a simple and reliable means. CONSTITUTION: Each stator disc has a truncated conical shape for inclining a vane, and inside them along the outer edge of a circular shape, tabs 10 and 10a are installed protruding in the radial direction for fixing the stator discs between two adjoining spacer rings 18 split into two semicircular portions having stationary tab-parts. Accordingly a counterflow of gas passing through a gap between the stator and a pump accommodation part and directed to the suction side of a pump can reach the internal space of the stator and be sent out therefrom. |
