MANUFACTURE OF FIELD EMISSION COLD CATHODE, FIELD EMISSION COLD CATHODE USING IT AND FLAT IMAGE DISPLAY

摘要

PURPOSE:To enhance the shape reproducibility and uniformity of an emitter and the controllability of the distance between gate and emitter and to easily enlarge the area where the emitter is formed. CONSTITUTION:A thermally oxidized insulating layer 13 is formed on a first substrate 11 having a recessed portion 12 the bottom portion of which is sharpened. As the inside of the recessed portion 12 is filled, a layer 14 of emitter material is formed on the thermally oxidized insulating layer 13. The first substrate 11 is joined to a second substrate 17 comprising a structural substrate. The first substrate 11 is removed by etching to expose the thermally oxidized insulating layer 13 and a projecting portion 18 corresponding to the emitter material filling the recessed portion is projected. A gate electrode layer 19 is formed on the thermally oxidized insulating layer 13 being exposed and then part of the thermally oxidized insulating layer 13 and the gate electrode layer 14 is removed to expose a projecting end portin 18a, to form an emitter 18.