POSITIONING DEVICE PROVIDED WITH TWO PARALLEL ACTUATING MANIPULATORS AND OPTICAL LITHOGRAPHIC APPARATUS PROVIDED WITH ABOVE POSITIONING DEVICE

摘要

PURPOSE: To return an object to a housing position while the following object is carried to an operating position by a method wherein carrying arms are respectively made to displace by means of separate manipulators. CONSTITUTION: A frame 61 of a positioning device 59 is extendedly provided in a direction Z and has a column 63 fixed on the lateral surface 65 of a base 15 on its lower side. First and second support plates 67 and 69 are fixed on the column 63 at a certain distance from each other and the plates 67 and 69 are both extendedly provided from the column 63 toward a lens system 1. The upper side surface 71 of the plate 67 and the lower side surface 73 of the plate 69 are both extendedly provided vertically to the direction Z. A first XY manipulator 75 of the device 59 is fixed on the upper side surface 71 of the plate 67. Thereby, a first gripper arm 77 is diesplaced in parallel in directions X and Y. A second XY manipulator 79 is fixed on the lower side surface 73 of the plate 69 and a second gripper arm 81 is displaceable in the directions X and Y.