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发明名称
MANUFACTURING EQUIPMENT OF SEMICONDUCTOR
摘要
申请公布号
JPH08330237(A)
申请公布日期
1996.12.13
申请号
JP19950133196
申请日期
1995.05.31
申请人
NEC CORP
发明人
AOYAMA HIROSHI
分类号
C23C16/44;C23C16/455;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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