发明名称 EXHAUST GAS TREATMENT APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To efficiently decompose exhaust gas while attaining the miniaturization of an apparatus by providing a flame guide pipe extending from the end part on the air outlet side of a combustion air introducing pipe to the other end part of a treatment cylinder. SOLUTION: Exhaust gas is sent into an exhaust gas introducing pipe 28 and the respective supply pipes 36, 38, 40 of fuel gas, fuel air and cooling air and an exhaust blower 14 are driven. By the driving of the supply sources, the fuel gas and combustion air are respectively supplied to a fuel gas introducing pipe 31 and a combustion air introducing pipe 33 in predetermined flow rates. Herein, an ignition means is operated and the mixed gas of the fuel gas and the combustion air is ignited by an ignition means and the formed flame is brought into contact with mixed gas discharged from the lower end of the exhaust gas introducing pipe 28 and the substance contained in exhaust gas is decomposed. The flame of the mixed gas is decomposed. The flame of the mixed gas extends to the vicinity of the bottom plate 20 of a treatment cylinder 18 by the presence of the flame conduit 34 and, as a result, the contact effect of the exhaust flame and the flame is enhanced and even a stable substance such as fluorocarbon can be thermally decomposed.</p>
申请公布号 JPH09108532(A) 申请公布日期 1997.04.28
申请号 JP19950267500 申请日期 1995.10.16
申请人 TEISAN KK 发明人 IBARAKI YOSHIHIRO;INA HIDEKAZU;MAKIOKA TAKAYUKI
分类号 B01D53/34;B01D53/68;B01D53/70;F23G7/06;H01L21/02;(IPC1-7):B01D53/34 主分类号 B01D53/34
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