METHOD FOR MANUFACTURING SILICON SEMICONDUCTOR DEVICE,申请号JP19960071788-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING SILICON SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH09260639(A)	申请公布日期	1997.10.03
申请号	JP19960071788	申请日期	1996.03.27
申请人	HITACHI LTD	发明人	MOCHIZUKI YASUHIRO
分类号	H01L29/74;H01L21/265;H01L29/06;H01L29/10;(IPC1-7):H01L29/74;H01L21/324	主分类号	H01L29/74
代理机构		代理人
主权项
地址

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