| 摘要 |
Fixed electrodes (A through F) are formed by means of a structural layer that has been provided on fixed bodies (71 through 74) of a silicon micro-machined substrate and a movable electrode (G) is formed by a movable body attached to fixed bodies (51 through 54) by flexible members (61 through 64). Variable capacitors of the parallel plate-type are formed by the movable electrode (G) and the fixed electrodes (A through F). When the movable electrode (G) has been vibrated, the Coriolis force incident to rotation or the force incident to acceleration are added to the movable electrode (G), with a result that the charge of the various variable capacitors change. By detecting the change in charge, both angular velocity and acceleration can be obtained. By providing another variable capacitor formed by a mass portion (H) by a movable body and the substrate, acceleration components in the directions of three axes can be detected. <IMAGE> <IMAGE> |
