| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively and easily manufacture high-performance elements and to manufacture alignment parts of V-grooves, etc., integrally with optical waveguides by applying a liquid photosetting material on a clad material, placing a metal mold having desired recess-shaped parts thereon and irradiating this material through the metal mold with light, thereby curing the material. SOLUTION: A high-polymer film is applied by means, such as spin coating on dipping, on a substrate 1 to form a clad layer 2. A monomer or oligomer which exhibits a flow property at room temp. is applied by similar means on this clad layer 2. Next, the metal mold 4 having the desired recess-shaped parts is placed on this substrate 1 and the monomer or oligomer is cured by photoirradiation 5 through the metal mold to form the core parts 6 in this monomer or oligomer. After the metal mold 4 is removed, an uncured material is developed and washed away by a solvent and, thereafter, the high-polymer film is again put thereon, by which the waveguide elements consisting of the core and the clad are formed. The metallic mold 4 having the recess-shaped parts is preferably glass or high polymer which is transparent at the wavelength to photoset the metal mold. |
