| 摘要 |
PROBLEM TO BE SOLVED: To easily form a fine through-hole arranged with an electroconductive material and with at most a specified value by a method wherein a ceramic green sheet is arranged between counter electrodes and after a through-hole is formed by means of electrical discharge impact by applying electric voltage on the electrodes, it is fired. SOLUTION: A ceramic green sheet 1 with flexibility is supported horizontally on a supporting stage 4 and the region where a through-hole is formed on the sheet 1 is counterposed between electrodes 2. Discharging is performed by applying an electric voltage of 1kv on the electrodes to form a through-hole in this region. When the electrodes have a plane-like shape, a plurality of electrical discharge impacts are generated and a plurality of through-holes are formed in a definite region. The diameter of the through-hole is at most 100μm. The sheet 1 wherein the through-holes are formed are transferred in a firing furnace, wherein after binder is removed at low temp., it is fired at high temp. There exist the through-holes on the calcined ceramic base and coating by plating, etc., is performed on these through-holes to form electroconductive through-holes.
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