| 摘要 |
PROBLEM TO BE SOLVED: To ensure the stable polishing accuracy so as to heighten the productivity by pressing the top face of a thin plate as an object to be polished on a surface plate to a traveling support through a holding sheet by plural rotatable pressure rollers, and bringing elevating abrasives into contact with a traverse device of the traveling support under the supply of a liquid abrasive while being rotated. SOLUTION: Pressure rollers 16a, 16b are lowered by an elevating device 21 to be pressed to the top face of a thin plate 2 placed on a belt 10 on a surface plate 1. A buff 14 is brought into contact with the surface of the thin plate 2 and moved in the cross direction of the thin plate 2 while being rotated by the movement of a traverse device, and by traveling of a traveling support 13, the pressure rollers 16a, 16b are rotated to press the thin plate 2, and moved in the longitudinal direction of the thin plate 2 to perform mirror finished surface polishing. The pressure rollers 16a, 16b are moved with traveling of the traveling support 13, and the traverse device is moved to press the thin plate 2 in a stationary state during polishing. A polishing agent supply device 17 is adapted to supply and stop a liquid abrasive before the pressure rollers 16a, 16b start to press the top face of the thin plate 2 and after releasing. |
