| 摘要 |
PURPOSE:To enhance washing efficiency by adding N-methylpyrrolidone to a washing soln. of the spin coater line piping of a coating device of a positive type resist soln. used in the production of an integrated circuit. CONSTITUTION:A washing soln. used in the washing of spin coater line piping is prepared from a compsn. containing N-methylpyrrolidone and pref. prepared as a mixure of at least one kind of an org. solvent selected from the group consisting of dichloromethane, cyclopentanone and acetone with N- methylpyrrolidone. At the time of the washing of the spin coater line piping, at first, the spin coater line piping is washed with a resist solvent as it is or after a resist soln. is discharged from the spin coater line piping and subsequently washed with N-methylpyrrolidone or the washing soln. of the above mixture. |
