MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19970198846-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH1145880(A)	申请公布日期	1999.02.16
申请号	JP19970198846	申请日期	1997.07.24
申请人	NEC KYUSHU LTD	发明人	HONDA YUJI
分类号	C23C16/30;C23C16/44;C23C16/455;H01L21/205;H01L21/31;H01L21/318;(IPC1-7):H01L21/31	主分类号	C23C16/30
代理机构		代理人
主权项
地址

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