发明名称 |
Position detection apparatus having a plurality of detection sections, and exposure apparatus |
摘要 |
A surface position detection apparatus of this invention includes a position detection section having a plurality of electrodes opposing the object surface to be measured, and a measurement device for selecting at least one electrode of the plurality of electrodes in accordance with the shape of the object surface, supplying an AC current to the selected electrode, and measuring the current flowing to the electrode, thereby measuring the distance between the electrode and object surface.
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申请公布号 |
US2002093635(A1) |
申请公布日期 |
2002.07.18 |
申请号 |
US20020059294 |
申请日期 |
2002.01.31 |
申请人 |
OGURI HISAAKI;SASAKI TOYOSHIGE;HASEGAWA MASANOBU |
发明人 |
OGURI HISAAKI;SASAKI TOYOSHIGE;HASEGAWA MASANOBU |
分类号 |
H01L21/027;G01B7/00;G03F7/207;G03F9/00;H01L21/66;(IPC1-7):G03B27/42 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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