Sample support for a microscope, particularly for examining an integrated circuit with a high-resolution microscope

摘要

Microscope sample support (14) comprises a base (18) adapted so that it can be rigidly fixed to a microscope frame (13) and a plate (30) for mounting said sample so that it can be moved on the base. Means (20, 24, 32, 34) are provided that allow the plate to tiled about two axes (X, Y) relative to the base. The invention also relates to a corresponding microscope.