METHOD AND FILTRATION MEMBRANE FOR ANALYZING IMPURITY

摘要

PROBLEM TO BE SOLVED: To make an impurity filtrated from an inspection liquid used, as it is, for measurement by a microscopic infrared spectrophotometer and a pyrolysis gas chromatograph mass spectrometer. SOLUTION: In this filtration membrane 10 of the present invention for impurity analysis, a mesh filter 11 comprising a material having no infrared absorption or a material for total-reflecting an infrared ray, and comprising a ferromagnetic alloy having a Curie point of a volatilization temperature or a pyrolisis temperature, or more, of the impurity is formed to filtrate the impurity.