A cluster tool system using twin process chamber and a method of plating a thin film thereof,申请号KR20030100121-传众专利搜索

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发明名称	A cluster tool system using twin process chamber and a method of plating a thin film thereof
摘要
申请公布号	KR100569604(B1)	申请公布日期	2006.04.10
申请号	KR20030100121	申请日期	2003.12.30
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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