| 摘要 |
PROBLEM TO BE SOLVED: To provide a quality determination device, a quality determination method and a quality determination program capable of performing quality determination accurately even in the case where a plurality of modes are mixed. SOLUTION: In the case where some element in a bad group N having a different quality attribute is mixed in a distribution domain of a good group G, or in the case where some element in the good group G having a different quality attribute is mixed in a distribution domain of the bad group N, new groups A, B, C, D are formed around the mixed projection element, and the groups are subdivided. Since it is determined whether a parameter value of an inspection object is close to each center value D<SB>g</SB>, C<SB>n</SB>, C<SB>a</SB>, C<SB>b</SB>, C<SB>c</SB>, C<SB>d</SB>of the subdivided groups G, N, A, B, C, D or not, highly-accurate quality determination can be achieved. COPYRIGHT: (C)2006,JPO&NCIPI |
