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发明名称	APPARATUS FOR VACUUM PROCESSING
摘要
申请公布号	KR20070041950(A)	申请公布日期	2007.04.20
申请号	KR20050097642	申请日期	2005.10.17
申请人	ADP ENGINEERING CO., LTD.	发明人	LEE, YOUNG JONG;CHOI, JUN YOUNG;SON, HYOUNG KYU;LEE, JEONG BIN;KIM, HYUNG SOO;HAN, MYUNG WOO
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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