发明名称 |
Laser annealing method and laser annealing device |
摘要 |
In order to promote an effect of laser annealing in respect of a semiconductor film, moisture is intentionally included in an atmosphere in irradiating laser beam to the semiconductor film by which a temperature holding layer comprising water vapor is formed on the surface of the semiconductor film in irradiating the laser beam and the laser annealing operation can be performed effectively.
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申请公布号 |
US7271042(B2) |
申请公布日期 |
2007.09.18 |
申请号 |
US20040921872 |
申请日期 |
2004.08.20 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
KUSUMOTO NAOTO;YAMAZAKI SHUNPEI;TANAKA KOICHIRO |
分类号 |
H01L21/324;H01L21/336;B08B3/04;C30B1/04;C30B28/02;G01Q60/24;G01Q90/00;H01L21/00;H01L21/20;H01L21/268;H01L21/84 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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