| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a microlens substrate for improving efficiency of using light at a low manufacturing cost. <P>SOLUTION: The aperture area of a first recessed part is easily made smaller than the aperture area of an aperture part. Namely, when the surface of a first mask layer and the side surface of the aperture part are covered with a second mask layer, the aperture area of the first recessed part is formed to be smaller than the aperture part because of the layer thickness of the second mask layer itself with which the side surface of the aperture part is covered. The area of a plane part is made small without using an expensive exposure apparatus. Thus, the microlens substrate capable of improving the efficiency of using the light is manufactured at the low manufacturing cost. <P>COPYRIGHT: (C)2007,JPO&INPIT |
