发明名称 SPUTTERING TARGET FOR MANUFACTURING MAGNETIC RECORDING MEDIUM, MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING MEDIUM AND PERPENDICULAR MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording medium capable of dealing with high density recording by reducing oxidation of ferromagnetic fine particles in a granular magnetic layer to suppress deterioration of magnetic characteristics and to provide a sputtering target suitable for manufacturing the perpendicular magnetic recording medium. SOLUTION: In the sputtering target which is used when a magnetic recording layer of the perpendicular magnetic recording medium provided with at least the magnetic recording layer 6 on a substrate 1 is film-deposited and comprises a ferromagnetic material and a metal oxide, the metal oxide is so formed that the number of oxygen atoms contained in the metal oxide is made smaller than that of a stoichiometric ratio. The perpendicular magnetic recording medium is obtained by film-depositing the magnetic recording layer by a sputtering method using the sputtering target for manufacturing the magnetic recording medium. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008090917(A) 申请公布日期 2008.04.17
申请号 JP20060270168 申请日期 2006.09.30
申请人 HOYA CORP 发明人 KAMIMURA MASAKI
分类号 G11B5/851;C23C14/34;G11B5/65 主分类号 G11B5/851
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