SPECIMEN EVALUATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a new evaluation method of an evaluation object having high selectivity and a reduced noise.

SOLUTION: In this specimen evaluation method for applying an AC voltage between a substrate electrode and a counter electrode provided on a substrate, and evaluating a specimen by observation of a signal acquired from a marker provided on the specimen bonded onto the substrate electrode, behavior of a mean value of the marker signal is observed by changing a frequency of the AC voltage.

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