CYLINDRICAL CERAMIC SINTERED COMPACT AND METHOD FOR PRODUCTION THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a method for production of a cylindrical ceramic sintered compact few in deformation at burning and capable of restraining cracks or chips at joining to a backing tube or at sputtering.SOLUTION: A method for production of a cylindrical ceramic sintered compact includes: setting a sole plate 3 having a vent hole 4 in a burning furnace; disposing plural support members 5 on the sole plate 3 radially around the vent hole 4 so that the longitudinal direction of the support member coincides with the radial direction of a circle of the vent hole 4 as a center; placing a cylindrical ceramic molded body 6 molded by a CIP (cold isostatic press) method on the support member 5 in an erected state so that the center of the vent hole 4 coincides with a cylinder axis; and then burning.SELECTED DRAWING: Figure 1