发明名称 WAFER PROCESSING TAPE
摘要 The purpose of the present invention is to provide a wafer processing tape, reducing label marks and reducing inflow of air to a space between an adhesive layer and a release film. The wafer processing tape comprises: the long release film (11); the adhesive layer (12) having a predetermined flat surface shape and installed on a first surface of the release film (11); an adhesive film (13) covering the adhesive layer (12), having a label unit (13a) which has the predetermined flat surface shape and is installed to come in contact with the release film (11) around the adhesive layer (12), and having a peripheral unit (13b) surrounding the outside of the label unit (13a); and a support unit (14) formed on a second surface opposite to the first surface of the release film (11) and installed in both short end parts of the release film (11). The support member (14) has a thickness which is equal to or more than 0.3 times of the thickness of the adhesive layer (12) and less than 1.0 times the thickness of the adhesive layer (12).
申请公布号 KR20160067758(A) 申请公布日期 2016.06.14
申请号 KR20150170629 申请日期 2015.12.02
申请人 FURUKAWA ELECTRIC CO., LTD. 发明人 AOYAMA MASAMI;OTA SATOSHI;KIMURA KAZUHIRO;SAKUMA NOBORU;SUGIYAMA JIROU
分类号 H01L21/683;H01L21/78 主分类号 H01L21/683
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