Multi-Magnetron Arrangement

摘要

A method and a device for carrying out the method for processing surfaces of workpieces, preferably of large substrates, are presented. The intent is to arrange the processing devices on the casing of a drum-type carrier in a vacuum chamber. The workpiece is transported over the drum and optionally made to rotate. The drum-type carriers is rotated in such a way that the intended processing device is turned towards the workpiece and can process it. The surface section to be processed can be selected via translation and rotation.

主权项

1. Device for processing surfaces that has a vacuum chamber with
a transport device with a main axis of motion and accommodations for at least one workpiece, a rotatable carrier drum with at least two processing devices arranged on it that are surrounded by an enclosure that has an opening for the workpiece,wherein at least one processing device is aligned in an operating position with respect to the workpiece in the opening of the enclosure, characterized in that the distance from the processing device to the surface to be processed in the operating position is approximately equal to the distance from the processing device or processing devices that are not in the operating position to the enclosure.