发明名称 IMPRINT PRINTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an imprint printing device, capable of accuracy transferring a transfer pattern formed to a mold to a body to be transferred, and further, releasing the mold from a transfer body.SOLUTION: A center part of a body to be transferred 5 mounted on a table 10 is pushed-up by a push-up part 70, a mold 7 is depressed by a depression part 80, and the mold 7 is closely adhered to the center part of body to be transferred 5. The depression part 80 and the push-up part 70 are depressed and the entire mold 7 is depressed by a mold moving part 30, and the body to be transferred 5 and the mold 7 are closely adhered toward an outer side from the center part of the body to be transferred 5. Thereafter, a transfer pattern of the mold 7 is transferred to the body to be transferred 5 by a transfer part 40 in a state of pressing the mold 7 to the body to be transferred 5 by a pressing part 20. Thereafter, the pressing state of mold 7 to the body to be transferred 5 is released, three positions of the out side of an edge part of the mold 7 are sequentially pushed-up by the mold moving part 30, and the mold 7 is separated from the body to be transferred 5.SELECTED DRAWING: Figure 6
申请公布号 JP2016162839(A) 申请公布日期 2016.09.05
申请号 JP20150038939 申请日期 2015.02.27
申请人 MINO GROUP CO LTD;TOHOKU UNIV 发明人 NONODA TAKESHI;IKEDO HIROAKI;NAKAGAWA MASARU
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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