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发明名称
Anordnung zum Absuchen elektronenmikroskopischer Objekte durch Ablenken des Elektronenstrahls
摘要
申请公布号
DE898501(C)
申请公布日期
1953.11.30
申请号
DE1950S020910
申请日期
1950.11.17
申请人
SUEDDEUTSCHE LABORATORIEN G.M.B.H.
发明人
SCHERZER OTTO DR. PHIL.;RANG OTTO DIPL.-ING.
分类号
H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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