发明名称 MULTILAYER LTCC TUB ARCHITECTURE FOR HERMETICALLY SEALING SEMICONDUCTOR DIE, EXTERNAL ELECTRICAL ACCESS FOR WHICH IS PROVIDED BY WAY OF SIDEWALL RECESSES
摘要 A packaging assembly for a semiconductor circuit chip is formed of a hermetically sealable, "tub"-like structure (10). The tub-like structure is comprised of a laminated stack of thin layers (11) of low temperature co-fired ceramic (LTCC) material. The laminated stack of LTCC layers contains an internally distributed network of interconnect links through which a semiconductor die (18), that has been mounted at a floor portion of the tub, may be elecrically connected to a plurality of conductive recesses or pockets located at top (81) and bottom (87) sidewall edge portions of the tub, thereby allowing multiple tubs to be joined together as a hermetically sealed assembly and electrically interconnected at the conductive pockets of adjacent tubs.
申请公布号 WO9500972(A1) 申请公布日期 1995.01.05
申请号 WO1994US07604 申请日期 1994.06.28
申请人 HARRIS CORPORATION 发明人 NEWTON, CHARLES, M.;PALMER, EDWARD, G.;SANCHEZ, ALBERT;MYERS, CHRISTOPHER, A.
分类号 H01L21/48;H01L21/60;H01L23/13;H01L23/498;H01L25/10 主分类号 H01L21/48
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